MONOLITHIC INTEGRATION OF RF MEMS SWITCH AND GAAS-MMIC PROCESS FOR RF SENSING APPLICATIONS B. Grandchamp, H. Maher, P. Frijlink OMMIC
نویسنده
چکیده
This paper shows the promising results in the integration of low-loss and high isolation RF MEMS switch in OMMIC GaAs MMIC process line. This technology has been used to design building blocs (such as reconfigurable impedance matching network for reconfigurable LNAs) targeting phased arrays applications. This work is part of the FP7 EU-project MEMS-4-MMIC.
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